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IGS

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IGS

제품설명

Introduction  

  • .PFK Co. – PFK has superior accumulated Know-How and product development capabilities because it has been manufactured and merchandise semiconductor/display device & instruments for 16 years.
  • .PFK has absolute advantage in production within the due date, quality and cost especially at semiconductor device temperature measuring solution, Gas Supply Solution, safety monitoring Solution.
  • .As distributer of Ham-let, right of selling high quality valve
  • .Design structure of IGS (Integrated Gas Supply) Panel itself. 
  • .PFK is only one Korean corporation specialized in C-seal in fact, and has sold more than 1000 set during 10 years.


Advatage 

  
  
 
Welded design
1.5” Conventional
1.125” K1S
Space
3630 cm2
1200 cm2
660 cm2
Weight
45 kg
82 kg
28 kg
Footprint
/Space Save
100
50
Welded≦50%
25
“1.5”≦50%
Weight/10stk
45.9kg/10stk
57.2kg/10stk
36.8kg/10stk


 
W-Seal
C-Seal
Conclusion
Note
Seismic Design
No problem
No problem
OK
.Seismic designed equipment
.Working conditions are satisfied
 Size Weight
C-Seal 에 비해 무거움
Lighter than W-Seal
C-Seal is better
Base block and valves which W-Seal needs are all heavier than C-Seal's
 Solution
Use Custom made block
-
C-Seal is better
W-seal is needs special care for other components and delivery time.
Delivery Time
8~10 Weeks
4~6 Weeks
C-Seal is better
 

Space
1000
80
C-Seal is smaller
About 20% space save
 Part Supplier
Fujikin Only
Many Company
C-Seal 이 더 Flexible
Parts can be supplied by various manufacturers, it easy to respond in case of acquiring parts is in emergency
 Appling Company
Several(TEL,KE) 
Global Major AMAT,LAM
Global Major Company Adopt C-seal type
 



  •  
  •  .By minimalizing installation space, can save footprint and space.
  •  .Cut down cost
  •  .Maintenance is easy
  •  .Global &  product quality excellence verification
  •     - AMAT has used [C-Seal] IGS since 24 years ago.
  •     - In Korea/global sell and operate 1000 set
  •  .Fast production and short delivery time that meet customers needs are possible.


Example of using  


CVD
 
LAM Vector Express
Wonik IPS GEMINI CVD,ALD SYSTEM, MOLD, MP ARC
ETCH
LAM 300mm all Model
TEL 300mm all Model
AMAT 300mm all Model
METAL
Wonik IPS TACOH,TACOH300, ALD DPT



Structure of product