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IGS
제품설명
Introduction
- ．PFK Co. – PFK has superior accumulated Know-How and product development capabilities because it has been manufactured and merchandise semiconductor/display device & instruments for 16 years.
- ．PFK has absolute advantage in production within the due date, quality and cost especially at semiconductor device temperature measuring solution, Gas Supply Solution, safety monitoring Solution.
- ．As distributer of Ham-let, right of selling high quality valve
- ．Design structure of IGS (Integrated Gas Supply) Panel itself.
- ．PFK is only one Korean corporation specialized in C-seal in fact, and has sold more than 1000 set during 10 years.
Advatage
 |  |  | |
Welded design | 1.5” Conventional | 1.125” K1S | |
Space | 3630 cm2 | 1200 cm2 | 660 cm2 |
Weight | 45 kg | 82 kg | 28 kg |
Footprint /Space Save | 100 | 50 Welded≦50% | 25 “1.5”≦50% |
Weight/10stk | 45.9kg/10stk | 57.2kg/10stk | 36.8kg/10stk |
W-Seal | C-Seal | Conclusion | Note | ||
| Seismic Design | No problem | No problem | OK | .Seismic designed equipment .Working conditions are satisfied | |
| Size | Weight | C-Seal 에 비해 무거움 | Lighter than W-Seal | C-Seal is better | Base block and valves which W-Seal needs are all heavier than C-Seal's |
| Solution | Use Custom made block | - | C-Seal is better | W-seal is needs special care for other components and delivery time. | |
| Delivery Time | 8~10 Weeks | 4~6 Weeks | C-Seal is better | ||
| Space | 1000 | 80 | C-Seal is smaller | About 20% space save | |
| Part Supplier | Fujikin Only | Many Company | C-Seal 이 더 Flexible | Parts can be supplied by various manufacturers, it easy to respond in case of acquiring parts is in emergency | |
| Appling Company | Several(TEL,KE) | Global Major AMAT,LAM | Global Major Company Adopt C-seal type | ||
- ．By minimalizing installation space, can save footprint and space.
- ．Cut down cost
- ．Maintenance is easy
- ．Global & product quality excellence verification
- - AMAT has used [C-Seal] IGS since 24 years ago.
- - In Korea/global sell and operate 1000 set
- ．Fast production and short delivery time that meet customers needs are possible.
Example of using
CVD | |
| LAM Vector Express | |
| Wonik IPS GEMINI CVD,ALD SYSTEM, MOLD, MP ARC | |
ETCH | LAM 300mm all Model |
| TEL 300mm all Model | |
| AMAT 300mm all Model | |
METAL | Wonik IPS TACOH,TACOH300, ALD DPT |
Structure of product
