본문
Map Data Logger
제품설명
Summary
The-Map specification
■ It can easily see and take the data of temperature uniformity of wafer inside the chamber.
(Data saving and export to Excel sheet)
■ Use thermocouple wafer and possible to find a real-time data of temperature on the wafer
■ Software developed by PFK with the date logger from
■ “National Instrument” will show a reliable and accurate temperature
The-Map Certificate