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UHP Pressure & Vacuum Switches
제품설명
UHP gas handling requirement
▪ Semiconductor production technology development
→ Ultra high pure(UHP)gas is required.
- Purity: More than 99.999%
- Sensitive control of pressure and flow of gas is required.
- Occurring of pollution is should be avoided.
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▪ Gas supply equipment and part requirements
- Block corrosion and contamination
- Use the highest purity material
- Highest level of internal surface condition
- Best connectivity device - SEMI Standard
- Safety – Maintain accuracy and system stability
UC8/UC9 Series
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▪ Absolute Reference and Gauge Reference ▪ Highest level blocking corrosion - SEMI F20 standard 316L SUS material - Elgiloy special alloy diaphragm ▪ 5 Ra surface quality ▪ Separation possible M8 standard connector | ▪ Extensive performance and reliability testing - Stability test: over 2,000,000 cycles - Leakage test : 1 x 10-9 cc/sec He - Proof and Burst pressure test - Operating and storage temperature test - Corrosivity test : ASTM CPT Test standard - Cleanliness test : ASTM Particle Count standard |
UHP 150/160 Series
▪ Gauge Reference
▪ All welded SUS material
▪ Capsule type sensor : Welded two diaphragm structures.
▪ Directly welded to the lower diaphragm main body to prevent leakage.
▪ Body : SUS 316 ▪ Diagram : SUS 17-7 ▪ Heat treatment
▪ Used in semiconductor equipment for decades
- Chamber pressure switch
Punction test
- Durability test
- - Functional test : More than 2,000,000 times
- - Performance test is performed per 100,000 times durability test
- Temperature test
- - Operating test ( -20⁰ to 60⁰ C)
- - Storage temperature test (-40⁰ C to 100⁰ C)
- He Leakage Inspection (Internal Penetration / External Leakage)
- Pressure inspection (Proof pressure / Burst pressure)
- Functional inspection (linearity/accuracy)
- Corrosion protection check
